JPS5751946B2 - - Google Patents

Info

Publication number
JPS5751946B2
JPS5751946B2 JP6330375A JP6330375A JPS5751946B2 JP S5751946 B2 JPS5751946 B2 JP S5751946B2 JP 6330375 A JP6330375 A JP 6330375A JP 6330375 A JP6330375 A JP 6330375A JP S5751946 B2 JPS5751946 B2 JP S5751946B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6330375A
Other languages
Japanese (ja)
Other versions
JPS51139262A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6330375A priority Critical patent/JPS51139262A/ja
Publication of JPS51139262A publication Critical patent/JPS51139262A/ja
Publication of JPS5751946B2 publication Critical patent/JPS5751946B2/ja
Granted legal-status Critical Current

Links

JP6330375A 1975-05-27 1975-05-27 Method of manufacturing super-high frequency integrated circuit Granted JPS51139262A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6330375A JPS51139262A (en) 1975-05-27 1975-05-27 Method of manufacturing super-high frequency integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6330375A JPS51139262A (en) 1975-05-27 1975-05-27 Method of manufacturing super-high frequency integrated circuit

Publications (2)

Publication Number Publication Date
JPS51139262A JPS51139262A (en) 1976-12-01
JPS5751946B2 true JPS5751946B2 (en]) 1982-11-05

Family

ID=13225388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6330375A Granted JPS51139262A (en) 1975-05-27 1975-05-27 Method of manufacturing super-high frequency integrated circuit

Country Status (1)

Country Link
JP (1) JPS51139262A (en])

Also Published As

Publication number Publication date
JPS51139262A (en) 1976-12-01

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